| The Nanofabrication Laboratory at MC2
The Nanofabrication Laboratory is a world-class university cleanroom for research and fabrication of micro and nanotechnology. It is managed by the Department of Microtechnology and Nanoscience (MC2) at Chalmers, but is an open facility for the entire university as well as external academic and commercial interests.
Cleanroom operation in its current form was started in 2001. The Laboratory is a state-of-the-art facility with 1240 sqm of cleanroom classified area with process and measurement tools providing a broad platform for the development and testing of new ideas in micro and nanotechnology. The Laboratory is also a member of µ-Fab, the Swedish micro and nano fabrication network supported by The Swedish research council, SSF, Vinnova and Knut and Alice Wallenberg Foundation.
MC2’s two strategic focus areas have recently resulted in the launch of two processing lines in the Laboratory to complement the flexible processing and materials environment. The lines increase the quality, throughput, and stability of the microwave & nano/quantum devices and components fabricated in the Laboratory.
|
