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Göran Alestig
PhD
Email
Processing competence: Göran Alestig is external projects coordinator
and acting as deputy lab manager. He is also part of the team responsible
for thin film deposition and plasma etching. With a background in semiconductor
circuit manufacturing, he can help with any general process integration
issues. |
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Johan Andersson
Research Engineer
Email
Processing competence: Has worked with numerous silicon related projects,
mostly MEMS applications including deep ASE plasma etching, contact lithographies,
oxidation/diffusion, LPCVD/PECVD deposition, metallization and wet chemistry
etching (TMAH and KOH silicon etching), both for internal research groups
as well as commercial companies. Additional responsibilities includes software
development (cleanroom related equipment software and internal booking system). |
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Örjan Arthursson
MSc
Email
Processing competence: Has a wide expertise in various metrology techniques
available at the MC2 nanofabrication facility, such as scanning probe microscopy
(SPM), optical microscopy, spectroscopic ellipsometry, stylus and optical
interferometry surface profilometry and various electrical characterisation
techniques. He is also a process specialist in silicon thermal processing,
including oxidation, diffusion, annealing and CVD deposition.
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Henrik Frederiksen
Research Engineer
Email
Processing competence: Process and equipment specialist in Physical Vapor
Deposition (sputtering, evaporation, pulsed laser deposition) of thin films,
resposible for most of the PVD equipment at MC2. Background in thin film
related R&D, as well as manufacturing and installation of thin film
deposition and etching equipment. |
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Mats Hagberg
PhD
Email
Processing competence: Has a background from industrial R&D on laser-diodes
and laser-diode manufacturing. At MC2 he is a process and equipment specialist
on plasma and ion-beam systems (etching & deposition), e-beam evaporation,
and rapid thermal processing. |
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John Halonen
Research Engineer
Email
Processing competence: Opto device processing
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Piotr Jedrasik
PhD
Email
Processing competence: Has expertise in electron beam lithography processing
and process optimization in deep sub-micron range. Proximity effects compensation
based on experimental and theoretical proximity function evaluation. Proximity
compensated three dimensional pattering for diffractive optical elements
fabrication. Sub-micron pattern transfer by wet and dry plasma/ion etching.
State-of-the-art sub-20nm negative and positive pattering by electron beam
lithography. |
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Bengt Nilsson
MSc
Email
Processing competence: Has 20 years experience and expertise in electron
beam lithography processing and process optimization in deep sub-micron
range, as well as in interaction with lab users and project planning. Pattern
data and job file pre-processing for e-beam exposure, proximity effects
compensation based on experimental and theoretical proximity function evaluation.
Sub-micron pattern transfer by wet and dry plasma/ion etching. State-of-the-art
sub-20nm negative and positive pattering by electron beam lithography. |
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Göran Petersson
PhD
Email
Processing competence: Göran Petersson is a process specialist with
long experience in silicon processing, e.g MOS processing, photo detector
processing and MEMS processing. |
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Mahdad Sadeghi
MSc + Lic.Eng
Email
Processing competence: Mahdad Sadeghi is an MBE specialist with long experience
in MBE growth of GaAs and InP based material. He is responsible for the
MBE system equipment, operation and maintenance at the nanofabrication
facility. Has experience from clean-room procedures, processing and characterization
of semiconducting material as for instance PL and X-ray diffraction techniques.
He is also the main responsible for the dicing/sawing facilities at the
Nanofabrication Laboratory.
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Ulf Södervall
PhD
Email
Processing competence: Is coordinator for the MC2Access programme. Is also
responsible for the training and education for new users of the nanofabrication
facilityand coordinating a PhD course in advanced micro and nanofabrication
processing. Processspecialist with main focus on Chemical Mechanical Planarisation/Polishing
and general wet processing applications, wafer cleaning, etching etc. Has
a long experience from materials and surface characterisation mainly from
SIMS (not included in MC2access). |
