What is your main outcome?
I am very much impressed by the speed of the work done at the Nanofabrication
Laboratory. Tremendous amount of work have been done in a relatively short
time thanks to MC2 staff. The laboratory is in excellent condition and maintained
continuously. The laboratory has a very good on-line booking system to handle
the equipment use very effectively by a number of users.
What research are you working on?
My work consists of growing Silicon based fluoride dielectric layers on
Si wafers and subsequent characterization by AFM(Atomic Force Microscope),
SEM(Scanning Electron Microscope), ellipsometry. It involves also the fabrication
of MIS (Metal-Insulator-Semiconductor) capacitors, formation of surface
sealing barriers using oxides and nitrides and metallization.
Your advice to future applicants?
I strongly recommend other users and applicants to take advantage of
the MC2 access program, This program provides an excellent infrastructure
in micro- and nano-fabrication of semiconducting devices and components
research. Researchers working in both Si and GaAs technology should consider
the MC2 facility as a lab where they can realize their research idea in
a most effective way.
Read the complete interview >> |
|
Dr Seref Kalem
TUBITAK-UEKAE
TURKEY |
