 |
||
 |
||
|
||
|
||
|
||
|
||
|
||
|
||
|
||
|
||
|
||
|
||
|
||
|
||
|
||
|
||
|
||
|
||
|
||
|
||
|
||
|
||
|
||
|
||
|
|
||
 |
||
| MME Workshop 2005 » Invited Speakers | ||
| Invited Speakers Dr. Jörg Bagdahn Micromechanical components group, Fraunhofer IWM, Halle, Germany Title: "Reliability of wafer Bonding in MST" Professor Mats Jonson Condensed Matter Theory Group, Chalmers University of Technology, Göteborg, Sweden Title: "When MEMS become NEMS" Professor Bengt Kasemo Chemical Physics, Chalmers University of Technology, Göteborg, Sweden Title: "Functionalized surfaces for sensing and activation at biointerfaces" Terje Kvisteroey, MEMS Innovations, SensoNor as, Norway Title: "Industrial MEMS - From Research to Industry". Professor Oliver Paul Faculty of Applied Sciences, University of Freiburg, Freiburg, Germany Title: "CMOS MEMS: A Critical Review" |
